Pengaruh Waktu Pra-etching dan Ketebalan Film pada Residual Stress dari Thin Film Aluminium Nitrida pada Sensor Magnetoelektrik

Authors

  • Hafid Suharyadi PEM Akamigas, BPSDM ESDM, Kementerian ESDM

DOI:

https://doi.org/10.37525/mz/2019-1/229

Keywords:

aluminium nitrida, waktu pra-etching, ketebalan thin film, residual stress, koefisien piezoelektrik transversal

Abstract

Komposit magnetoelektrik (ME) terdiri dari lapisan piezoelektrik dan lapisan magnetoelektrik yang disusun secara bergantian. Masalah yang paling sering ditemukan pada hasil deposisi thin film aluminium nitrida (AlN) sebagai lapisan piezoelektrik adalah residual stress. Riset ini bertujuan untuk mengoptimalkan parameter deposisi AlN dalam menghasilkan film AlN dengan residual stress yang mendekati nol tanpa mengorbankan sifat mikrostruktural dan respon piezoelektrik.

Pengaruh waktu pra-etching dan ketebalan film AlN pada residual stress, mikrostruktural, dan respon piezoelektrik telah dipelajari, masing-masing melalui dengan stylus profilometer, difraktometri sinar-X, dan metode 4-point bending. Urutan lapisan film yang dideposisikan pada substrat Si/SiO2 adalah Ta/Pt/AlN. Metode pulsed DC reactive sputter telah dilakukan untuk mendeposisikan film AlN.

Pengaruh waktu pra-etching pada residual stress AlN tidak menunjukkan perubahan yang signifikan. Nilai residual stress dari film AlN semakin rendah dengan meningkatkan ketebalan film akibat dari peningkatan arah tumbuh preferensial dari kristal AlN. FWHM dari puncak AlN (0002) hampir konstan dalam rentang waktu pra-etching. Dengan meningkatnya ketebalan film, penurunan FWHM dikaitkan dengan pertumbuhan kristal berbentuk kolom yang lebih baik. Hal ini juga menghasilkan magnitudo dari nilai e31, f yang lebih tinggi.

References

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Published

2019-06-18

How to Cite

Suharyadi, H. . (2019). Pengaruh Waktu Pra-etching dan Ketebalan Film pada Residual Stress dari Thin Film Aluminium Nitrida pada Sensor Magnetoelektrik. Jurnal Nasional Pengelolaan Energi MigasZoom, 1(1), 61–72. https://doi.org/10.37525/mz/2019-1/229

Issue

Vol. 1 No. 1 (2019): Maksimalkan Potensi Konservasi Energi

Section

Articles

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